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Proceedings Paper

Measurement on roughness of optical surface by focal plane CCD camera
Author(s): Jianbai Li; Xiaoyun Li; Aihan Ying; Anqing Zao; Xiaolin Zhang
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Paper Abstract

In this paper, the new method on evaluating and measuring roughness of optical surface by CCD camera is presented. The microstructure of surface of samples studied is revealed by a replication technique. The electron photomicrographs of one surface replication of each sample is obtained at two magnification. We note that a grained structure is presented due to residual rough grooves from polishing process. The electron photomicrographs of optical surface is scanned and analyzed by CCD camera-microcomputer system. The corresponding surface profiles are displayed at CRT of microcomputer system, with X-axis corresponding the micrograph spatial coordinate and Y-axis corresponding the micrograph density (i.e. roughness of the real surface). The above-mentioned method has both good vertical and lateral resolution (0.1 - 1.0 nm) due to using CCD camera scanner, but a poor lateral one (100 - 1000 nm) by classical interferometer method. The new method has availability for evaluating and testing optical and supersmooth surface.

Paper Details

Date Published: 1 April 1998
PDF: 4 pages
Proc. SPIE 3275, Flatness, Roughness, and Discrete Defects Characterization for Computer Disks, Wafers, and Flat Panel Displays II, (1 April 1998); doi: 10.1117/12.304393
Show Author Affiliations
Jianbai Li, Jiangxi Academy of Sciences (China)
Xiaoyun Li, Jiangxi Academy of Sciences (China)
Aihan Ying, Jiangxi Academy of Sciences (China)
Anqing Zao, Jiangxi Academy of Sciences (China)
Xiaolin Zhang, Jiangxi Academy of Sciences (China)


Published in SPIE Proceedings Vol. 3275:
Flatness, Roughness, and Discrete Defects Characterization for Computer Disks, Wafers, and Flat Panel Displays II
John C. Stover, Editor(s)

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