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Proceedings Paper

X-ray scanner for the visualization of the spatial distribution of nanometer-scale roughness
Author(s): Vladimir V. Protopopov; Kamil A. Valiev; Rafik M. Imamov
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Paper Abstract

In the x-ray region, the reflection efficiency of a superpolished surface strongly depends on its roughness. This effect may be used to obtain a 2D map of the roughness spatial distribution for flat surfaces with a rms. roughness height of the order of one nanometer. The basic components of such a device are a precision mechanical 1D scanning stage and a temperature stabilized cooled x-ray linear detector array with quantum efficiency at CuK(alpha ) radiation.

Paper Details

Date Published: 1 April 1998
PDF: 8 pages
Proc. SPIE 3275, Flatness, Roughness, and Discrete Defects Characterization for Computer Disks, Wafers, and Flat Panel Displays II, (1 April 1998); doi: 10.1117/12.304391
Show Author Affiliations
Vladimir V. Protopopov, Institute of Physics and Technology (Russia)
Kamil A. Valiev, Institute of Physics and Technology (Russia)
Rafik M. Imamov, Shubnikov Institute of Crystallography (Russia)


Published in SPIE Proceedings Vol. 3275:
Flatness, Roughness, and Discrete Defects Characterization for Computer Disks, Wafers, and Flat Panel Displays II
John C. Stover, Editor(s)

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