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Proceedings Paper

Characterization of bulk-micromachined direct-bonded silicon nanofilters
Author(s): Jay K. Tu; Tony Huen; Robert Szema; Mauro Ferrari
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Paper Abstract

The ability to separate 30-100 nm particles - nanofiltration - is critical for many biomedical applications. Where this filtration needs to be absolute, such as for viral elimination in the blood fractionation process, the large variations in pore size found with conventional polymeric filters can lead to the unwanted presence of viruses in the filtrate. To overcome this problem, we have developed a filter with micromachined channels sandwiched between two bonded silicon wafers. These channels are formed through the selective deposition and then removal of a thermally-grown oxide, the thickness of which can be controlled to +/- 4 percent for 30 nm pores. In this paper, we will present both the gas and liquid characterization, and the filtration studies done on 44 and 100 nm beads.

Paper Details

Date Published: 26 March 1998
PDF: 8 pages
Proc. SPIE 3258, Micro- and Nanofabricated Structures and Devices for Biomedical Environmental Applications, (26 March 1998); doi: 10.1117/12.304374
Show Author Affiliations
Jay K. Tu, Univ. of California/Berkeley (United States)
Tony Huen, Univ. of California/Berkeley (United States)
Robert Szema, Univ. of California/Berkeley (United States)
Mauro Ferrari, Univ. of California/Berkeley (United States)


Published in SPIE Proceedings Vol. 3258:
Micro- and Nanofabricated Structures and Devices for Biomedical Environmental Applications
Paul Lee Gourley, Editor(s)

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