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Proceedings Paper

Monolithic fabrication of nanofluidic artificial gel media for DNA electrophoresis
Author(s): Stephen W. Turner; Harold G. Craighead
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Paper Abstract

A new technique for fabricating 2D artificial gels for DNA electrophoresis is presented. The technique differs from previous approaches in that the entire device is fabricated as a monolithic unit using exclusively planar processing techniques borrowed from semiconductor electronics fabrication. The height of the fluid gap between the dielectric floor and ceiling is determined by the thickness of a sacrificial layer which is removed by a wet chemical etch. This allows precise control and excellent uniformity of the gap over an entire silicon wafer. Gap control better than 5 nm has been demonstrated for floor-to-ceiling height for the fluid gap. The lateral resolution which can be attained is limited only by available lithographic techniques. In this work, 1 micrometers diameter pillars are defined with i-line photolithography. Fluid interconnects are established with a liquid meniscus to the hedge of the device.

Paper Details

Date Published: 26 March 1998
PDF: 8 pages
Proc. SPIE 3258, Micro- and Nanofabricated Structures and Devices for Biomedical Environmental Applications, (26 March 1998); doi: 10.1117/12.304369
Show Author Affiliations
Stephen W. Turner, Cornell Univ. (United States)
Harold G. Craighead, Cornell Univ. (United States)


Published in SPIE Proceedings Vol. 3258:
Micro- and Nanofabricated Structures and Devices for Biomedical Environmental Applications
Paul Lee Gourley, Editor(s)

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