Share Email Print
cover

Proceedings Paper

MEMS-based diffractive optical-beam-steering technology
Author(s): David A. Winick; Bruce E. Duewer; Som Chaudhury; John M. Wilson; John Tucker; Umut Eksi; Paul D. Franzon
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

This paper presents some results from phase-1 research into developing a beam steerer based on micro-mechanical diffractive elements. The position of these elements is electrostatically controlled, to allow dynamic programming of a 2D phase function. Feasibility prototypes were constructed in the MUMPs polysilicon surface micromachine process.

Paper Details

Date Published: 15 March 1998
PDF: 7 pages
Proc. SPIE 3276, Miniaturized Systems with Micro-Optics and Micromechanics III, (15 March 1998); doi: 10.1117/12.302411
Show Author Affiliations
David A. Winick, North Carolina State Univ. (United States)
Bruce E. Duewer, North Carolina State Univ. (United States)
Som Chaudhury, North Carolina State Univ. (United States)
John M. Wilson, North Carolina State Univ. (United States)
John Tucker, North Carolina State Univ. (United States)
Umut Eksi, North Carolina State Univ. (United States)
Paul D. Franzon, North Carolina State Univ. (United States)


Published in SPIE Proceedings Vol. 3276:
Miniaturized Systems with Micro-Optics and Micromechanics III
M. Edward Motamedi; Rolf Goering, Editor(s)

© SPIE. Terms of Use
Back to Top