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Proceedings Paper

Mechanical-optical analysis of InP-based Bragg membranes for selective tunable WDM receivers
Author(s): Rolf Riemenschneider; Joachim Peerlings; Joachim Pfeiffer; A. Dehe; Andreas Vogt; Peter M. Meissner; Hans L. Hartnagel; N. Chitica; Juergen Daleiden-; Klaus P. Streubel; Harald Kuenzel; W. Goertz
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Paper Abstract

Monolithically-integrated wavelength-selective receivers are needed for dense wavelength-division multiplex transmission in the 1.55 micrometers wavelength regime. We present a novel concept for tunable optical Fabry-Perot filters with long resonant cavities of about 30 micrometers . III-V semiconductor technology compatible to PIN detector integration is applied to fabricate bulk-micromachined movable membrane Bragg mirrors. The initial membrane curvature as well as the actuation-induced bending are analyzed using a white light interferometer. Continuous filter tuning achieved by thermal or electrostatical actuation is analyzed in the optical as well as in the mechanical regime. Opto-mechanical constraints of the realized filters are discussed in view of novel epitaxial demands and optimum design for micro-opto- electro-mechanical receiver systems.

Paper Details

Date Published: 15 March 1998
PDF: 11 pages
Proc. SPIE 3276, Miniaturized Systems with Micro-Optics and Micromechanics III, (15 March 1998); doi: 10.1117/12.302395
Show Author Affiliations
Rolf Riemenschneider, Technical Univ. of Darmstadt (Germany)
Joachim Peerlings, Technical Univ. of Darmstadt (Germany)
Joachim Pfeiffer, Technical Univ. of Darmstadt (Germany)
A. Dehe, Technical Univ. of Darmstadt (Germany)
Andreas Vogt, Technical Univ. of Darmstadt (Germany)
Peter M. Meissner, Technical Univ. of Darmstadt (Germany)
Hans L. Hartnagel, Technical Univ. of Darmstadt (Germany)
N. Chitica, Royal Institute of Technology (Sweden)
Juergen Daleiden-, Royal Institute of Technology (Sweden)
Klaus P. Streubel, Royal Institute of Technology (Germany)
Harald Kuenzel, Heinrich-Hertz-Institut fuer Nachrichtentechnik/Berlin (Germany)
W. Goertz, Deutsche Telekom (Germany)


Published in SPIE Proceedings Vol. 3276:
Miniaturized Systems with Micro-Optics and Micromechanics III
M. Edward Motamedi; Rolf Goering, Editor(s)

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