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Proceedings Paper

Heterodyne interferometer for measurement of linear displacements of a rough sample
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Paper Abstract

Theoretical background of a heterodyne interferometer to measure linear displacements of a rough surface is presented. The surface of a sample is illuminated by two laser beams having mutually slightly shifted frequencies by using acousto- optic modulators. The essential parameters of the system measuring in-plane and out-of-plane displacement are discussed.

Paper Details

Date Published: 1 January 1998
PDF: 6 pages
Proc. SPIE 3320, Tenth Polish-Czech-Slovak Optical Conference: Wave and Quantum Aspects of Contemporary Optics, (1 January 1998); doi: 10.1117/12.301329
Show Author Affiliations
Tomasz S. Tkaczyk, Warsaw Univ. of Technology (United States)
Romulad Jozwicki, Warsaw Univ. of Technology (Poland)


Published in SPIE Proceedings Vol. 3320:
Tenth Polish-Czech-Slovak Optical Conference: Wave and Quantum Aspects of Contemporary Optics
Jerzy Nowak; Marek Zajac, Editor(s)

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