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Proceedings Paper

Is mask repair economic?
Author(s): Wayne Smith
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Paper Abstract

Mask repair cost's impact on mask cost is studied. The study focuses on 0.35 (mu) through 0.18 (mu) technology generations. General economic observations on mask repair are made. The study was conducted using a commercial cost of ownership model with sensitivity analysis conducted on salient parameters.

Paper Details

Date Published: 12 February 1997
PDF: 9 pages
Proc. SPIE 3236, 17th Annual BACUS Symposium on Photomask Technology and Management, (12 February 1997); doi: 10.1117/12.301226
Show Author Affiliations
Wayne Smith, SEMATECH (United States)


Published in SPIE Proceedings Vol. 3236:
17th Annual BACUS Symposium on Photomask Technology and Management
James A. Reynolds; Brian J. Grenon, Editor(s)

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