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Proceedings Paper

Analysis of the thickness measurement of multilayer optical thin films with grazing incident x-ray
Author(s): Xueqian Li; Xiaowei Song; Yi Qu; Mei Li; Xingde Zhang
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Paper Abstract

The measuring conditions of the thickness of thin films with grazing incident x-ray is explained, and interferential principle and method to measure the thickness of thin films by grazing incident x-ray are discussed and analyzed in the paper. The periodic thickness of the multilayer optical thin films is measured with double-crystal diffractometer at a very small grazing incident angle, the result is satisfactory and measured values is in good agreement with designed values.

Paper Details

Date Published: 20 February 1998
PDF: 4 pages
Proc. SPIE 3175, Third International Conference on Thin Film Physics and Applications, (20 February 1998); doi: 10.1117/12.300731
Show Author Affiliations
Xueqian Li, Changchun Institute of Optics and Fine Mechanics (China)
Xiaowei Song, Changchun Institute of Optics and Fine Mechanics (China)
Yi Qu, Changchun Institute of Optics and Fine Mechanics (China)
Mei Li, Changchun Institute of Optics and Fine Mechanics (China)
Xingde Zhang, Changchun Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 3175:
Third International Conference on Thin Film Physics and Applications
Shixun Zhou; Yongling Wang; Yi-Xin Chen; Shuzheng Mao, Editor(s)

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