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Proceedings Paper

MBE technology and semiconductor laser material growth
Author(s): Guo-Jun Liu; Qianyong Zhang; Han Yang; Xingde Zhang; Xueqian Li; Yi Qu; Xiaowei Song; Xiaohua Wang
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Paper Abstract

This paper summarizes the technical characteristics and performance of our newly purchased VG V80H MBE system. Our research work on thin film semiconductor laser materials growth on this system has also been presented here, with some discussion on beam flux stability and growth uniformity et al.

Paper Details

Date Published: 20 February 1998
PDF: 4 pages
Proc. SPIE 3175, Third International Conference on Thin Film Physics and Applications, (20 February 1998); doi: 10.1117/12.300715
Show Author Affiliations
Guo-Jun Liu, Changchun Institute of Optics and Fine Mechanics (China)
Qianyong Zhang, Changchun Institute of Optics and Fine Mechanics (China)
Han Yang, Changchun Institute of Optics and Fine Mechanics (China)
Xingde Zhang, Changchun Institute of Optics and Fine Mechanics (China)
Xueqian Li, Changchun Institute of Optics and Fine Mechanics (China)
Yi Qu, Changchun Institute of Optics and Fine Mechanics (China)
Xiaowei Song, Changchun Institute of Optics and Fine Mechanics (China)
Xiaohua Wang, Changchun Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 3175:
Third International Conference on Thin Film Physics and Applications
Shixun Zhou; Yongling Wang; Yi-Xin Chen; Shuzheng Mao, Editor(s)

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