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Proceedings Paper

Polymerized-film replication of micro-optics elements
Author(s): Lin Pang; Bo Chen; Lurong Guo; Hongjun Zeng; Weijian Tian
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Paper Abstract

A new method for replicating microstructure elements is presented. The principle and technological process of the method are introduced. For one polymer, deep binary relief grating on quartz substrate is replicated by using this new method and the relief-transfer efficiency and transparency are measured. The results show that the replicas are of high fidelity of profile and are suitable for practical applications.

Paper Details

Date Published: 20 February 1998
PDF: 5 pages
Proc. SPIE 3175, Third International Conference on Thin Film Physics and Applications, (20 February 1998); doi: 10.1117/12.300709
Show Author Affiliations
Lin Pang, Sichuan Univ. (China)
Bo Chen, Sichuan Univ. (China)
Lurong Guo, Sichuan Univ. (China)
Hongjun Zeng, Sichuan Univ. (China)
Weijian Tian, Sichuan Univ. (China)


Published in SPIE Proceedings Vol. 3175:
Third International Conference on Thin Film Physics and Applications

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