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Proceedings Paper

Technology of ultrathin films for ion-preventive feedback
Author(s): Delong Jiang; Jingquan Tian; Guo-Jun Liu; Yaohua Lu; Ye Li; Lichen Fu; Guifen Wang
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Paper Abstract

This paper introduces the materials and structure as well as the forming method of ultrathin films for ion-preventative feedback. The characteristics and measuring results are given. In the meantime, preliminary analysis and discussion are carried out.

Paper Details

Date Published: 20 February 1998
PDF: 4 pages
Proc. SPIE 3175, Third International Conference on Thin Film Physics and Applications, (20 February 1998); doi: 10.1117/12.300701
Show Author Affiliations
Delong Jiang, Changchun Institute of Optics and Fine Mechanics (China)
Jingquan Tian, Changchun Institute of Optics and Fine Mechanics (China)
Guo-Jun Liu, Changchun Institute of Optics and Fine Mechanics (China)
Yaohua Lu, Changchun Institute of Optics and Fine Mechanics (China)
Ye Li, Changchun Institute of Optics and Fine Mechanics (China)
Lichen Fu, Changchun Institute of Optics and Fine Mechanics (China)
Guifen Wang, Changchun Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 3175:
Third International Conference on Thin Film Physics and Applications
Shixun Zhou; Yongling Wang; Yi-Xin Chen; Shuzheng Mao, Editor(s)

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