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Proceedings Paper

Two-dimensional growth and structural characterization of oxide ceramic thin films grown by laser molecular beam epitaxy
Author(s): Guozhen Yang; Huibin Lu; Dafu Cui; Hui-sheng Wang; Yueliang Zhou; Zhenghao Chen
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Paper Abstract

Atomically regulated unit-cell by unit-cell homoepitaxial SrTiO3 (STO) and heteroepitaxial BaTiO3 (BTO) films were fabricated on STO (100) substrates by laser molecular beam epitaxy. The fine streak patterns and more than 1000 cycles undamping intensity oscillation were obtained by in situ reflection high-energy electron diffraction (RHEED). The films were examined by atomic force microscopy (AFM), X-ray diffraction (XRD), x-ray photoelectron spectrometer (XPS), (phi) scan, and the cross-section high-resolution TEM. The root-mean-square surface roughness of the films is about 0.1 nm. The FWHM of the XRD (omega) -rocking curve for the (200) diffraction peak of BTO film is 0.235 degrees. The results indicate that the films have a high degree of c-oriented epitaxial crystalline structure and the surfaces of films are atomically smooth.

Paper Details

Date Published: 20 February 1998
PDF: 5 pages
Proc. SPIE 3175, Third International Conference on Thin Film Physics and Applications, (20 February 1998); doi: 10.1117/12.300699
Show Author Affiliations
Guozhen Yang, Institute of Physics and Ctr. for Condensed Matter Physics (China)
Huibin Lu, Institute of Physics (China)
Dafu Cui, Institute of Physics and Ctr. for Condensed Matter Physics (China)
Hui-sheng Wang, Institute of Physics and Ctr. for Condensed Matter Physics (China)
Yueliang Zhou, Institute of Physics and Ctr. for Condensed Matter Physics (China)
Zhenghao Chen, Institute of Physics and Ctr. for Condensed Matter Physics (China)


Published in SPIE Proceedings Vol. 3175:
Third International Conference on Thin Film Physics and Applications
Shixun Zhou; Yongling Wang; Yi-Xin Chen; Shuzheng Mao, Editor(s)

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