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Proceedings Paper

Pulsed laser scanning deposition of diamondlike thin films
Author(s): You-qing Wang; Qiulang Wang; Chengwu An; Biao Su
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Paper Abstract

Diamondlike thin films were prepared by irradiation of high purity graphite with a high power density( 1.178 x I 09 Watt I cm2 ) laser (XeCI 308 nm) in the vacuum ( I x 10-s Torr) . Raman spectra show the thin film with the properties of diamond, the scatter peak is in round 1330 cm-1 . The IR spectra show the thin film containing C-H bonds, and the ratio ofH to C is about 45%. The resistivity and optical energy gap of the thin film are 1.89 x 106 .0 .cm and 1.55 e. V, respectively. Keywords: Pulsed Laser deposition, Diamondlike thin film, Raman spectra.

Paper Details

Date Published: 20 February 1998
PDF: 4 pages
Proc. SPIE 3175, Third International Conference on Thin Film Physics and Applications, (20 February 1998); doi: 10.1117/12.300671
Show Author Affiliations
You-qing Wang, Huazhong Univ. of Science and Technology (China)
Qiulang Wang, Huazhong Univ. of Science and Technology (China)
Chengwu An, Huazhong Univ. of Science and Technology (China)
Biao Su, Huazhong Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 3175:
Third International Conference on Thin Film Physics and Applications
Shixun Zhou; Yongling Wang; Yi-Xin Chen; Shuzheng Mao, Editor(s)

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