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Proceedings Paper

Deposition of YBCO thin film with buffer layer by unbalanced magnetron sputtering
Author(s): Chunaeni Latief; M. Barmawi
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Paper Abstract

YBCO thin film with strontium titanate buffer layer has been made by using unbalanced magnetron sputtering (UMS). It has been shown experimentally that resputtering effect, usually takes place in balanced magnetron sputtering and glow discharge sputtering is suppressed. It turns out that the critical temperature as well as the critical current is improved.

Paper Details

Date Published: 20 February 1998
PDF: 4 pages
Proc. SPIE 3175, Third International Conference on Thin Film Physics and Applications, (20 February 1998); doi: 10.1117/12.300667
Show Author Affiliations
Chunaeni Latief, Institut Teknologi Bandung (Indonesia)
M. Barmawi, Institut Teknologi Bandung (Indonesia)


Published in SPIE Proceedings Vol. 3175:
Third International Conference on Thin Film Physics and Applications
Shixun Zhou; Yongling Wang; Yi-Xin Chen; Shuzheng Mao, Editor(s)

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