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Proceedings Paper

Optics coatings by magnetron sputtering deposition
Author(s): Mingli Wang; Zhengxiu Fan
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Paper Abstract

This paper reports the multi-layer optics films processed by magnetron sputtering, and investigated the film thickness monitor and the deposition processes control techniques systematically. And successfully makes the coatings of 0.2% reflection in the visible region.

Paper Details

Date Published: 20 February 1998
PDF: 3 pages
Proc. SPIE 3175, Third International Conference on Thin Film Physics and Applications, (20 February 1998); doi: 10.1117/12.300652
Show Author Affiliations
Mingli Wang, Shanghai Institute of Optics and Fine Mechanics (China)
Zhengxiu Fan, Shanghai Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 3175:
Third International Conference on Thin Film Physics and Applications

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