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Proceedings Paper

Integrated optic vertical polarization splitters using polymers
Author(s): Sean M. Garner; Vadim Chuyanov; Antao Chen; Sang-Shin Lee; William H. Steier; Larry Raymond Dalton
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Paper Abstract

We present design considerations and fabrication results for a vertically integrated waveguide polarization splitter. Fabrication techniques of shadow reactive ion etching (RIE) and variable photolithography exposure produced the required vertical waveguide structures. The fabricated vertical waveguide bends exhibit excess loss of only 0.2dB. By constructing this vertical bend with a birefringent polyimide, simulation results show the possibility of a polarization splitter with an extinction ratio of over 15dB. We demonstrate preliminary waveguide experiments showing the practicality of these structures as three dimensionally integrated optical devices.

Paper Details

Date Published: 12 January 1998
PDF: 9 pages
Proc. SPIE 3278, Integrated Optic Devices II, (12 January 1998); doi: 10.1117/12.298220
Show Author Affiliations
Sean M. Garner, Univ. of Southern California (United States)
Vadim Chuyanov, Univ. of Southern California (United States)
Antao Chen, Univ. of Southern California (United States)
Sang-Shin Lee, Univ. of Southern California (United States)
William H. Steier, Univ. of Southern California (United States)
Larry Raymond Dalton, Univ. of Southern California (United States)

Published in SPIE Proceedings Vol. 3278:
Integrated Optic Devices II
Giancarlo C. Righini; S. Iraj Najafi; Bahram Jalali, Editor(s)

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