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Proceedings Paper

Integrated optical devices achieved by sol gel process
Author(s): Paul Coudray; Pascal Etienne; Jerome Porque; Yves Moreau; S. Iraj Najafi
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Paper Abstract

We present design considerations and fabrication results for a vertically integrated waveguide polarization splitter. Fabrication techniques of shadow reactive ion etching and variable photolithography exposure produced the required vertical waveguide structures. The fabricated vertical waveguide bends exhibit excess loss of only 0.2dB. By constructing this vertical bend with a birefringent polyimide, simulation results show the possibility of a polarization splitter wit an extinction ratio of over 15dB. We demonstrate preliminary waveguide experiments showing the practicality of these structures as 3D integrated optical devices.

Paper Details

Date Published: 12 January 1998
PDF: 7 pages
Proc. SPIE 3278, Integrated Optic Devices II, (12 January 1998); doi: 10.1117/12.298209
Show Author Affiliations
Paul Coudray, Univ. de Montpellier II (France)
Pascal Etienne, Univ. de Montpellier II (France)
Jerome Porque, Univ. de Montpellier II (France)
Yves Moreau, Univ. de Montpellier II (France)
S. Iraj Najafi, Ecole Polytechnique de Montreal (Canada)


Published in SPIE Proceedings Vol. 3278:
Integrated Optic Devices II
Giancarlo C. Righini; S. Iraj Najafi; Bahram Jalali, Editor(s)

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