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Proceedings Paper

3D computer vision for microassembly stations and microfabrication
Author(s): Armin Sulzmann; Jacques Jacot
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Paper Abstract

In this article we describe the use of 3D computer vision for microassembly stations and future microfabrication. 3D measurements are performed using a newly developed high precision 3D computer vision system to characterize the spacial positions of the microrobots or microgrippers in action. To describe relative motion of the microrobots or microactuators, the natural texture of the micropart is used to compute 3D displacement. The microscope image CCD receives high frequency changes in light intensity from the surface of the gripper in focus. Using depth of focus, high resolution camera calibration, passive auto focus algorithms and 2D object recognition, the position and the displacement of the microrobot can be characterized in the 3D workspace and can be guided in micro-assembly tasks. Newly developed microgripper with integrated tracking structures will be presented to illustrate and explain the approach. Several other examples like chip manipulation and micromotor assembly will be presented and discussed.

Paper Details

Date Published: 1 January 1998
PDF: 10 pages
Proc. SPIE 3202, Microrobotics and Microsystem Fabrication, (1 January 1998); doi: 10.1117/12.298044
Show Author Affiliations
Armin Sulzmann, Swiss Federal Institute of Technology/Lausanne (Switzerland)
Jacques Jacot, Swiss Federal Institute of Technology/Lausanne (Switzerland)

Published in SPIE Proceedings Vol. 3202:
Microrobotics and Microsystem Fabrication
Armin Sulzmann, Editor(s)

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