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Proceedings Paper

Integrating force and vision feedback for microassembly
Author(s): Bradley J. Nelson; Yu Zhou; Barmeshwar Vikramaditya
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Paper Abstract

For microassembly tasks uncertainty exists at many levels.Single static sensing configuration are therefore unable to provide feedback with the necessary range and resolution for accomplishing many desired tasks. In this paper we present experimental results that investigate the integration of two disparate sensing modalities, force and vision, for sensor-based microassembly. By integrating these sensing modes, we are able to provide feedback in a task- oriented frame of reference over a broad range of motion with an extremely high precision. An optical microscope is used to provide visual feedback down to micro resolutions, while an optical beam deflection technique is used to provide nanonewton level force feedback or nanometric level position feedback. Visually served motion at speeds of up to 2mm/s with a repeatability of 0.17 micrometers are achieved with vision alone. The optical beam deflection sensor complements the visual feedback by providing positional feedback with a repeatability of a few nanometers. Based on the principles of optical beam deflection, this is equivalent to force measurements on the order of a nanonewton. The value of integrating these two disparate sensing modalities is demonstrated during controlled micropart impact experiments. These results demonstrate micropart approach velocities of 80 micrometers /s with impact forces of 9nN and final contact forces of 2nN. Within our microassembly system this level of performance cannot be achieved using either sensing modality alone. This research will aid in the development of complex hybrid MEMS devices in two ways; by enabling the microassembly of more complex MEMS prototypes; and in the development of automatic assembly machines for assembling and packaging future MEMS devices that require increasingly complex assembly strategies.

Paper Details

Date Published: 1 January 1998
PDF: 12 pages
Proc. SPIE 3202, Microrobotics and Microsystem Fabrication, (1 January 1998); doi: 10.1117/12.298043
Show Author Affiliations
Bradley J. Nelson, Univ. of Illinois/Chicago (United States)
Yu Zhou, Univ. of Illinois/Chicago (United States)
Barmeshwar Vikramaditya, Univ. of Illinois/Chicago (United States)


Published in SPIE Proceedings Vol. 3202:
Microrobotics and Microsystem Fabrication
Armin Sulzmann, Editor(s)

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