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Proceedings Paper

Sensor-guided nanorobots
Author(s): Andreas Stemmer; Markus Brunner
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Paper Abstract

Autonomous nanorobots with overall dimensions in the micrometer domain promise fascinating applications in fields ranging from nanofabrication on the molecular scale to minimal invasive surgery in hard-to-reach places - yet, they are beyond the reach of current technology. IN contrast, scanning probe microscopes, despite their macroscopic overall dimensions, have amply proved their versatility in accessing the nanometer scale and providing the user an interface to interact with structures down to single atoms directly. To explore and evaluate control strategies for future nanorobots, we extended the capabilities of an atomic force microscope beyond its intrinsic nanometer-resolution surface-imaging function. To this end, we implemented an additional control loop which automatically guides a multifunctional nanoprobe to user-specified features on integrated circuits, tracks their structure, and acquires multichannel information about their local geometric and electric properties.

Paper Details

Date Published: 1 January 1998
PDF: 6 pages
Proc. SPIE 3202, Microrobotics and Microsystem Fabrication, (1 January 1998); doi: 10.1117/12.298040
Show Author Affiliations
Andreas Stemmer, Swiss Federal Institute of Technology/Zurich (Switzerland)
Markus Brunner, Swiss Federal Institute of Technology/Zurich (Switzerland)

Published in SPIE Proceedings Vol. 3202:
Microrobotics and Microsystem Fabrication
Armin Sulzmann, Editor(s)

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