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Proceedings Paper

Microwork transfer system in a nanomanufacturing world
Author(s): Kensuke Tsuchiya; Masayuki Nakao; Takenori Okusa; Yotaro Hatamura; Kiyoshi Matsumoto
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Paper Abstract

Practical micromachines, such as magnetic heads or endoscopic tools, can not be made only by shaping processes; they require post-machining processes such as assembling, wiring, piping, etc. The authors have developed an integrated manufacturing system, 'nano manufacturing world' (NMW). It performs shaping, post-machining or transferring like a factory. In this paper, we introduce a microwork transfer system, which functions a) steady transfer of a workpiece, b) non-release chucking of the workpiece during production and c) individual rotation of the workpiece using a preloaded microslide bearing on the pallet. Developed transfer system could realize the functions: less positioning error due to accurate pallet positioning by taper pins, high transfer yield of the workpieces due to no missing by a micro chuck, sub-micron rotational fluctuation due to a roller pallet by a preloaded micro slide bearing. Through the fabrication demonstrations of a sub-1 mm3 micro-house or micro force sensor block of 125 X 100 X 500 micrometers , it has been confirmed that this transfer system improved the performance of integrated manufacturing in NMW.

Paper Details

Date Published: 1 January 1998
PDF: 10 pages
Proc. SPIE 3202, Microrobotics and Microsystem Fabrication, (1 January 1998); doi: 10.1117/12.298032
Show Author Affiliations
Kensuke Tsuchiya, Univ. of Tokyo (Japan)
Masayuki Nakao, Univ. of Tokyo (Japan)
Takenori Okusa, Univ. of Tokyo (Japan)
Yotaro Hatamura, Univ. of Tokyo (Japan)
Kiyoshi Matsumoto, Univ. of Tokyo (Japan)

Published in SPIE Proceedings Vol. 3202:
Microrobotics and Microsystem Fabrication
Armin Sulzmann, Editor(s)

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