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Proceedings Paper

Manufacturing concepts and development trends in the industrial production of microelectromechanical systems
Author(s): Matthias Schuenemann; Ralf Grimme; Thomas Kaufmann; Gerhard Schwaab; Uwe Baeder; Wolfgang Schaefer; Johann Dorner
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Paper Abstract

During the past few years, remarkable affords have been made for the realization of microscale sensors, actuators and microelectromechanical system. Due to advances in solid state and micromachining technologies, significant advances in designing, fabricating and testing of microminiaturized devices have been achieved at laboratory level. However, the technical and economical realization of microelectromechanical systems is considerably impeded by the lack of satisfying device technology for their industrial production. A production concept for the industrial production of hybrid microelectromechanical systems was developed and investigated. The concept is based on the resources and requirements of medium-sized enterprises and is characterized by its flexibility. Microsystem fabrication is separated into microfabrication steps performed in-house and technological steps performed by external technology providers. The modularity of the concept allows for a gradual increase in the degree of automation and the in-house production depth, depending on market capacity and financial resources. To demonstrate the feasibility of this approach, the design and realization of a microfabrication process center, which includes tasks like transport and handling, processing, cleaning, testing and storing are discussed. Special attention is given to the supply and feeding of microparts, to the necessary magazines, trays and transport systems, to the implementation of homogeneous mechanical, environmental and information interfaces, to the employment of advanced control, scheduling, and lot tracking concepts, and to the application of highly modular and cost-efficient clean production concepts.

Paper Details

Date Published: 1 January 1998
PDF: 12 pages
Proc. SPIE 3202, Microrobotics and Microsystem Fabrication, (1 January 1998); doi: 10.1117/12.298030
Show Author Affiliations
Matthias Schuenemann, Fraunhofer-Institute for Manufacturing Engineering and Automation (Germany)
Ralf Grimme, Fraunhofer-Institute for Manufacturing Engineering and Automation (Germany)
Thomas Kaufmann, Fraunhofer-Institute for Manufacturing Engineering and Automation (Germany)
Gerhard Schwaab, Fraunhofer-Institute for Manufacturing Engineering and Automation (Germany)
Uwe Baeder, Fraunhofer-Institute for Manufacturing Engineering and Automation (Germany)
Wolfgang Schaefer, Fraunhofer-Institute for Manufacturing Engineering and Automation (Germany)
Johann Dorner, Fraunhofer-Institute for Manufacturing Engineering and Automation (Germany)


Published in SPIE Proceedings Vol. 3202:
Microrobotics and Microsystem Fabrication
Armin Sulzmann, Editor(s)

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