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Proceedings Paper

Experiments in micromanipulation and CAD-driven microassembly
Author(s): John T. Feddema; Chris G. Keller; Roger T. Howe
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Paper Abstract

This paper discusses recent experiments in the manipulation and assembly of parts with 100 micron outside dimensions and submicron tolerances. The objective of this work is to develop a micromanipulation workcell which can automatically assemble LIGA parts using an assembly plan and a CAD drawing of each of the components. The workcell consists of an AdeptOne robot, precision stages, and long distance microscope, and a high aspect ratio molded polysilicon tweezers for picking up the parts. Fourier optics methods are used to generate synthetic microscope magnifications and depths of field. They also provide reference image features which are used to visually servo the true part to the desired position.

Paper Details

Date Published: 1 January 1998
PDF: 10 pages
Proc. SPIE 3202, Microrobotics and Microsystem Fabrication, (1 January 1998); doi: 10.1117/12.298027
Show Author Affiliations
John T. Feddema, Sandia National Labs. (United States)
Chris G. Keller, Univ. of California/Berkeley (United States)
Roger T. Howe, Univ. of California/Berkeley (United States)

Published in SPIE Proceedings Vol. 3202:
Microrobotics and Microsystem Fabrication
Armin Sulzmann, Editor(s)

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