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Proceedings Paper

Near-field light microscopy with SEM light generation
Author(s): Vil B. Baiburin; Nikolai P. Konnov; Anatolyi A. Shcherbakov; Alina N. Malakhaeva; Yuri P. Volkov
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Paper Abstract

A new near field light microscope with SEM light generation (NFLEM) has been developed on the basis of modified SEM (Hitachi HU-12A). The scanning electron beam of the SEM passed through thin luminescent film coating a sample generates a small light spot. The light transmitted through the sample is registered by PMT. The wavelength of the light can be easily modified (from infrared to x-ray) by changing the luminescent film. The images of test objects (latex 0.1 micrometer, thin metal films) are obtained by the microscope.

Paper Details

Date Published: 29 December 1997
PDF: 3 pages
Proc. SPIE 3197, Optical Biopsies and Microscopic Techniques II, (29 December 1997); doi: 10.1117/12.297977
Show Author Affiliations
Vil B. Baiburin, Saratov Technical Univ. (Russia)
Nikolai P. Konnov, Russian Research Anti-Plague Institute Microbe (Russia)
Anatolyi A. Shcherbakov, Russian Research Anti-Plague Institute Microbe (Russia)
Alina N. Malakhaeva, Russian Research Anti-Plague Institute Microbe (Russia)
Yuri P. Volkov, Saratov Technical Univ. (Russia)

Published in SPIE Proceedings Vol. 3197:
Optical Biopsies and Microscopic Techniques II
Irving J. Bigio; Herbert Schneckenburger; Jan Slavik; Katarina Svanberg M.D.; Pierre M. Viallet, Editor(s)

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