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Proceedings Paper

Experimental multilayer survey in the VUV
Author(s): Franz Schaefers; Hans-Christoph Mertins; M. Mertin; Ingo Packe; F. Schmolla; Silvia Di Fonzo; G. Soullie; Werner H. Jark; Hans Grimmer; Peter Boeni; Daniel Clemens; Michael Horisberger; Nikolai N. Salashchenko; E. A. Shamov
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Paper Abstract

We present an experimental survey of the performance of various multilayer systems to be used in the soft x-ray range with special emphasis on the water window. The multilayers have been designed as high reflectance normal incidence mirrors and, for polarimetry purposes, as detectors for circularly polarized synchrotron radiation, respectively. Seven different multilayer systems with spacer materials of C or the transition metals Sc, Ti, V, Cr in combination with the absorber materials Fe, W and Ni were investigated. At the 1s- and 2p absorption edges, respectively, they show a strong resonant enhancement of the reflectance due to anomalous dispersion. By tailoring the layer thickness and the thickness ratio for use at and below the resonance energy in normal incidence ((theta) equals 90 degree(s)) and at (theta) equals 45 degree(s), respectively, an excellent performance with respect to reflectance, transmission and polarizance, respectively, in the water window was achieved for multilayers with period thicknesses down to 1.4 nm.

Paper Details

Date Published: 1 November 1997
PDF: 9 pages
Proc. SPIE 3152, Materials, Manufacturing, and Measurement for Synchrotron Radiation Mirrors, (1 November 1997); doi: 10.1117/12.295560
Show Author Affiliations
Franz Schaefers, BESSY mbH (Germany)
Hans-Christoph Mertins, BESSY mbH (Germany)
M. Mertin, BESSY mbH (Germany)
Ingo Packe, BESSY mbH (Germany)
F. Schmolla, BESSY mbH (Germany)
Silvia Di Fonzo, Sincrotrone Trieste (Italy)
G. Soullie, Sincrotrone Trieste (Italy)
Werner H. Jark, Sincrotrone Trieste (Italy)
Hans Grimmer, Swiss Federal Institute of Technology and Paul Scherrer Institut (Switzerland)
Peter Boeni, Swiss Federal Institute of Technology and Paul Scherrer Institut (Switzerland)
Daniel Clemens, Swiss Federal Institute of Technology and Paul Scherrer Institut (Switzerland)
Michael Horisberger, Swiss Federal Institute of Technology and Paul Scherrer Institut (Switzerland)
Nikolai N. Salashchenko, Institute for Physics of Microstructures (Russia)
E. A. Shamov, Institute for Physics of Microstructures (Russia)


Published in SPIE Proceedings Vol. 3152:
Materials, Manufacturing, and Measurement for Synchrotron Radiation Mirrors
Peter Z. Takacs; Thomas W. Tonnessen, Editor(s)

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