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Proceedings Paper

Improvement of synchrotron radiation mirrors below the 0.1-arcsec rms slope error limit with the help of a long trace profiler
Author(s): Heiner Lammert; Friedmar Senf; Marion Berger
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Paper Abstract

Traditional optical manufacturing methods employing both conventional and modern interferometric techniques, enable one to measure surface deviations to high accuracy, e.g. up to (lambda) 100 for flats (6 nm P-V). In synchrotron radiation applications the slope error is an important criterion for the quality of optical surfaces. In order to predict the performance of a synchrotron radiation mirror the slope errors of the surface must be known. Up to now, the highest achievable accuracy in the production of synchrotron radiation mirrors and in the measuring methods did not fall significantly below the 0.1 arcsec rms limit (spherical and flat surfaces). A long-trace profiler (LTP) is ideally suited for this task since it directly measures slope deviations with high precision. On the other hand, using an LTP becomes very sensitive to random and systematic errors at the limit of 0.1 arcsec. The main influence is the variation of the surrounding temperature in creating temporal and local temperature gradients at the instrument. At BESSY both temperature and vibrations are monitored at the most sensitive points of the LTP. In 1996 BESSY started a collaboration with a neighboring optical workshop combining traditional manufacturing technology with quasi- in-process high precision LTP measurements. As result of this mutual polishing and LTP measuring process, flat surfaces have been repeatedly produced with slope errors of 0.05 arcsec rms, e.g. 1 nm rms and 3 nm P-V (approximately equals (lambda) /200).

Paper Details

Date Published: 1 November 1997
PDF: 12 pages
Proc. SPIE 3152, Materials, Manufacturing, and Measurement for Synchrotron Radiation Mirrors, (1 November 1997); doi: 10.1117/12.295556
Show Author Affiliations
Heiner Lammert, BESSY mbH (Germany)
Friedmar Senf, BESSY mbH (Germany)
Marion Berger, Optikkomponenten und Kristalle (Germany)

Published in SPIE Proceedings Vol. 3152:
Materials, Manufacturing, and Measurement for Synchrotron Radiation Mirrors
Peter Z. Takacs; Thomas W. Tonnessen, Editor(s)

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