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Proceedings Paper

Online measurement system for monitoring ring tool misalignments
Author(s): Tong Xie; John E. Greivenkamp
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Paper Abstract

A new metrology technique was developed for on-line tool misalignment detection. It is an image based metrology system. It measures surface slope functions from the captured reflected image off the test surface. The measured surface slope function is then used to determine the corresponding tool misalignments in the ring grinding setup for the Opticam surface generator. A prototype detection system was built and tested on-line in the Opticam machine. The experimental results are presented in this paper.

Paper Details

Date Published: 1 November 1997
PDF: 10 pages
Proc. SPIE 3134, Optical Manufacturing and Testing II, (1 November 1997); doi: 10.1117/12.295150
Show Author Affiliations
Tong Xie, Optical Sciences Ctr./Univ. of Arizona (United States)
John E. Greivenkamp, Optical Sciences Ctr./Univ. of Arizona (United States)


Published in SPIE Proceedings Vol. 3134:
Optical Manufacturing and Testing II
H. Philip Stahl, Editor(s)

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