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Proceedings Paper

Fringe modulation characterization for a phase-shifting imaging ellipsometer
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Paper Abstract

An imaging ellipsometer has been developed which employs phase shifting interferometry to characterize the ellipsometric parameters. A modified Michelson interferometer is used in conjunction with a Wollaston prism to generate two interferograms with orthogonal polarization states. Subtraction of the phases in the two interferograms yields the ellipsometric parameter (Delta) . The fringe modulation of the two interferograms is used to calculate the ellipsometric parameter (Psi) . The characterization of the average intensity of the interferogram is the largest contributor to the errors in the modulation. New algorithms for reducing the errors in modulation calculations for phase shifting interferometry are presented. The deign of the instrument, results of measurements and algorithms for modulation characterization will be presented.

Paper Details

Date Published: 1 November 1997
PDF: 9 pages
Proc. SPIE 3134, Optical Manufacturing and Testing II, (1 November 1997); doi: 10.1117/12.295148
Show Author Affiliations
Conrad Wells, Univ. of Arizona (United States)
James C. Wyant, Optical Sciences Ctr./Univ. of Arizona and WYKO Corp. (United States)


Published in SPIE Proceedings Vol. 3134:
Optical Manufacturing and Testing II
H. Philip Stahl, Editor(s)

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