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Proceedings Paper

IR interferometers using modern cameras
Author(s): Chiayu Ai
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Paper Abstract

Laser interferometers have been used widely in the optics and disk drive industries. Often the surface of the sample is either too curved to resolve the fringes or too rough to reflect the incident beam back into the interferometer. Illuminating at a graze incident angle effectively increases the equivalent wavelength, and hence the reflectivity, but the image of a circular aperture becomes elliptical. Lasers with a long IR wavelength seem to be the solution. However,the spatial resolution of the vidicon cameras is usually poor, and the image lag is often too long. These limit the accuracy of an IR phase-shifting interferometer. Recently, we have designed tow types of interferometers for 3.39 micrometers and 10.6 micrometers using an InSb array and a micro- bolometer array, respectively. These modern cameras have a high resolution and hence greatly extend the range of measurable material from a blank to a finished optics. Because the refractive index of the optical material at the IR wavelength is usually very high, the anti-reflection coating of the optics at IR is more critical than that at a visible wavelength. The interferometer's design, the resolution, the dependence of the fringe contrast on the sample roughness, and the measurement results of various samples are presented.

Paper Details

Date Published: 1 November 1997
PDF: 4 pages
Proc. SPIE 3134, Optical Manufacturing and Testing II, (1 November 1997); doi: 10.1117/12.295147
Show Author Affiliations
Chiayu Ai, WYKO Corp. (United States)


Published in SPIE Proceedings Vol. 3134:
Optical Manufacturing and Testing II
H. Philip Stahl, Editor(s)

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