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Proceedings Paper

Radial shearing interferometer for in-process measurement of diamond turning
Author(s): Tsuguo Kohno; Daishi Matsumoto; Takanori Yazawa; Yutaka Uda
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Paper Abstract

A stable interferometer using two zone plates to measure concave mirror figure is developed. The principle of the measurement is based on the radial shearing interference in which the measuring wavefront from the entire mirror surface under test is referred to that of the central part. On-machine experiments showed that the interferometer would be applicable to the in-process measurement for a diamond turning in about 0.06 micrometers p-p accuracy.

Paper Details

Date Published: 12 December 1997
PDF: 6 pages
Proc. SPIE 3173, Ultrahigh- and High-Speed Photography and Image-based Motion Measurement, (12 December 1997); doi: 10.1117/12.294519
Show Author Affiliations
Tsuguo Kohno, Tokyo Metropolitan Institute of Technology (Japan)
Daishi Matsumoto, Tokyo Metropolitan Institute of Technology (Japan)
Takanori Yazawa, Tokyo Metropolitan Institute of Technology (Japan)
Yutaka Uda, Nikon Co. (Japan)


Published in SPIE Proceedings Vol. 3173:
Ultrahigh- and High-Speed Photography and Image-based Motion Measurement
C. Bruce Johnson; Andrew Davidhazy; James S. Walton; Takeharu Goji Etoh; C. Bruce Johnson; Donald R. Snyder; James S. Walton, Editor(s)

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