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Proceedings Paper

Micromachined field emitter arrays for application to FED
Author(s): Myung-Hwan Oh
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Paper Abstract

The fundamental goal in FED technology is the ability to construct emitters that present high-electron-emission characteristics and reliability with a low turn-on voltage. Several types of micromachined field emitter arrays combining silicon/metal tips with diamond-like carbon (DLC) coating are fabricated and examined for their applications to FEDs. Although there are some fluctuations of initial conduction current due to the unstable electron emission from the sharp emitter tips, FEAs panel whose silicon/metal tips are coated with DLC film by PECVD and layer-by-layer deposition shows remarkably lowered threshold voltage with increased current density.

Paper Details

Date Published: 14 November 1997
PDF: 9 pages
Proc. SPIE 3242, Smart Electronics and MEMS, (14 November 1997); doi: 10.1117/12.293563
Show Author Affiliations
Myung-Hwan Oh, Korea Institute of Science and Technology (South Korea)

Published in SPIE Proceedings Vol. 3242:
Smart Electronics and MEMS
Alex Hariz; Vijay K. Varadan; Olaf Reinhold, Editor(s)

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