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Proceedings Paper

Fiber optic Fabry-Perot pressure sensor with the Si3N4/SiO2/Si3N4 diaphragm fabricated using micromachining technology
Author(s): Myung Gyoo Kim; Jaehee Park; Shin-Won Kang; Byung-Ki Sohn
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Paper Abstract

We have developed the high sensitivity fiber optic Fabry- Perot pressure sensor with a Si3N4/SiO2/Si3N4(N/O/N) diaphragm fabricated using micromachining technology in the anisotropic etchant KOH solution. The configuration of this sensor was a 2 cm length fiber optic Fabry-Perot interferometer bonded to a 0.6 micrometers thick diaphragm. When the area of the N/O/N diaphragm used in the experiments was 2 X 2 mm2, the pressure sensitivity was 0.11 radian/kPa, and when the area was 8 X 8 mm2, the pressure sensitivity was increased to 1.57 radian/kPa. The phase change was dependent upon the applied pressure linearly.

Paper Details

Date Published: 14 November 1997
PDF: 7 pages
Proc. SPIE 3242, Smart Electronics and MEMS, (14 November 1997); doi: 10.1117/12.293555
Show Author Affiliations
Myung Gyoo Kim, Electronics and Telecommunication Research Institute (South Korea)
Jaehee Park, Keimyung Univ. (South Korea)
Shin-Won Kang, Kyungpook National Univ. (South Korea)
Byung-Ki Sohn, Kyungpook National Univ. (South Korea)


Published in SPIE Proceedings Vol. 3242:
Smart Electronics and MEMS
Alex Hariz; Vijay K. Varadan; Olaf Reinhold, Editor(s)

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