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Proceedings Paper

Force-balanced dual-axis microgyroscope
Author(s): Seungdo An; Yong-Soo Oh; Byeungleul Lee; Kyu-Yeon Park; Youn-il Go; Jeong-gon Kim; Ci Moo Song; Seungseob Lee
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Paper Abstract

The surface micromachining process realized the dual-axis microgyroscope. The 7.5 micrometers -thick polysilicon layer deposited by LPCVD is used for the vibrating structure. In this research, we present a new structure with high angular inertia momentum and compact size. In particular, this structure can utilize a simple force-balancing torsional torque which does not need another top electrode layer to reduce the intrinsic non-linearity of a capacitive-type sensor. The gyroscope is tested in a high vacuum chamber for a high Q-factor. The sensing mode is separated 2 percent from the driving mode by applying the inter-plate DC tuning bias. The experiment resulted in a nose equivalent signal of 0.1 deg/sec.

Paper Details

Date Published: 14 November 1997
PDF: 10 pages
Proc. SPIE 3242, Smart Electronics and MEMS, (14 November 1997); doi: 10.1117/12.293554
Show Author Affiliations
Seungdo An, Samsung Advanced Institute of Technology (South Korea)
Yong-Soo Oh, Samsung Advanced Institute of Technology (South Korea)
Byeungleul Lee, Samsung Advanced Institute of Technology (South Korea)
Kyu-Yeon Park, Samsung Electro-Mechanics Co. (South Korea)
Youn-il Go, Samsung Advanced Institute of Technology (South Korea)
Jeong-gon Kim, Samsung Advanced Institute of Technology (South Korea)
Ci Moo Song, Samsung Advanced Institute of Technology (South Korea)
Seungseob Lee, Pohang Univ. of Science and Technology (South Korea)


Published in SPIE Proceedings Vol. 3242:
Smart Electronics and MEMS
Alex Hariz; Vijay K. Varadan; Olaf Reinhold, Editor(s)

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