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Proceedings Paper

Silicon-based interferometric sensor with phase modulation driven by surface acoustic waves
Author(s): Eric Bonnotte; Christophe Gorecki; Hiroshi Toshiyoshi; Hideki Kawakatsu
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Paper Abstract

As a novel application of Silicon-based integrated optics, first result of a compact Mach-Zehnder interferometer are presented. This passive device is transformed into an active one by the deposition of a ZnO thin film transducer on the reference arm where the acousto-optics mechanism generates a sinusoidal phase modulation.

Paper Details

Date Published: 14 November 1997
PDF: 8 pages
Proc. SPIE 3242, Smart Electronics and MEMS, (14 November 1997); doi: 10.1117/12.293553
Show Author Affiliations
Eric Bonnotte, LIMMS/Univ. of Tokyo (Japan)
Christophe Gorecki, LIMMS/Univ. of Tokyo (Japan)
Hiroshi Toshiyoshi, Univ. of Tokyo (Japan)
Hideki Kawakatsu, Univ. of Tokyo (Japan)


Published in SPIE Proceedings Vol. 3242:
Smart Electronics and MEMS
Alex Hariz; Vijay K. Varadan; Olaf Reinhold, Editor(s)

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