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Proceedings Paper

Application of jet-printed PZT layers for actuation of small beams, membranes and a 2D scanning actuator
Author(s): Andreas Schroth; Masaaki Ichiki; Ryutaro Maeda; Jun Akedo; Sohei Matsumoto
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Paper Abstract

To close the technological thickness gap between vary thin PZT-layer deposition and bulk PZT, a new technology called Jet Printing has been introduced recently, which can be used to deposit layers between 5 and 100 micrometers thickness. This technology is used for the first time to fabricate bimorph actuator elements suitable for actuation purposes in MEMS. At first, 10 to 40 micrometers thin PZT layers are deposited on beam shaped structures made of 30 micrometers thick steel. This basic actuator beams were stimulated by an AC voltage, and the reflected laser beam showed reasonable dynamic deflection angels of about 5 degrees maximum. Secondly, deposition on anisotropically etched silicon membranes with varying thickness from 25 to 125 micrometers was carried out. It appeared, that at a membrane thickness lower than 50 micrometers technologically effects can break the membrane. However, for membranes thicker than that, direct deposition after anisotropic etching could be applied successfully, and dynamic deflection of this membranes could be proofed by laser interferometric measurement. Finally, a small structure capable of diverting a laser beam and carrying out 2D scanning was designed and fabricated from 30 micrometers thick steel using laser ablation. The scanner is actuated by four actuator beams, on which 30 micrometers thick PZT has been Jet Printed as the actuating material. The electrodes on the beams can be stimulated separately, and therefore control the scanning direction. Experiments showed the capability of the structure to be actuated, and deflection angels up to 5 degrees could be measured.

Paper Details

Date Published: 14 November 1997
PDF: 9 pages
Proc. SPIE 3242, Smart Electronics and MEMS, (14 November 1997); doi: 10.1117/12.293545
Show Author Affiliations
Andreas Schroth, Mechanical Engineering Lab. (Japan)
Masaaki Ichiki, Mechanical Engineering Lab. (Japan)
Ryutaro Maeda, Mechanical Engineering Lab. (Japan)
Jun Akedo, Mechanical Engineering Lab. (Japan)
Sohei Matsumoto, Mechanical Engineering Lab. (Japan)


Published in SPIE Proceedings Vol. 3242:
Smart Electronics and MEMS
Alex Hariz; Vijay K. Varadan; Olaf Reinhold, Editor(s)

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