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Proceedings Paper

Investigation of ZrO2(Ce4+) thin film for oxygen sensor
Author(s): Guolong Tan; Yanqi Wang; Hongfei Zhang; Xijun Wu
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Paper Abstract

The ionic conductivity and sensitivity of a series of Ce4+-doped zirconia thin film synthesized by sol-gel process are studied. The conductivity of the film is mainly depended on the doping ions and its concentration. The result shows that the ZrO2(Ce4+) solid solution is well suited to maintain the ionic conductivity in a wide composition range. A physical model has been proposed to explain the high sensitivity of the thin film.

Paper Details

Date Published: 14 November 1997
PDF: 4 pages
Proc. SPIE 3241, Smart Materials, Structures, and Integrated Systems, (14 November 1997); doi: 10.1117/12.293526
Show Author Affiliations
Guolong Tan, Zhejiang Univ. (China)
Yanqi Wang, Zhejiang Univ. (China)
Hongfei Zhang, Zhejiang Univ. (China)
Xijun Wu, Zhejiang Univ. (China)

Published in SPIE Proceedings Vol. 3241:
Smart Materials, Structures, and Integrated Systems
Alex Hariz; Vijay K. Varadan; Olaf Reinhold, Editor(s)

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