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Proceedings Paper

Nature of distortions of the surface pattern produced by precise electron-beam processing of insulators
Author(s): Anatoly M. Filachev; Boris I. Fouks; Dmitrii E. Greenfeld
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Paper Abstract

The paper deals with the problems that appear in the electron- beam processing of insulators and consist in distortion of the surface pattern created by an electron beam. There are presented the results of theoretical and experimental studies on the phenomena in insulators, which are powered by the electron-beam processing of their surfaces, and the effect of these phenomena on the precision of the processing.

Paper Details

Date Published: 25 September 1997
PDF: 11 pages
Proc. SPIE 3155, Charged Particle Optics III, (25 September 1997); doi: 10.1117/12.287815
Show Author Affiliations
Anatoly M. Filachev, Research Institute of Electron and Ion Optics (Russia)
Boris I. Fouks, Institute of Radioengineering and Electronics (Russia)
Dmitrii E. Greenfeld, Research Institute of Electron and Ion Optics (Russia)

Published in SPIE Proceedings Vol. 3155:
Charged Particle Optics III
Eric Munro, Editor(s)

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