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Proceedings Paper

Quality assessment of supersmooth to rough surfaces by multiple-wavelength light scattering measurement
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Paper Abstract

An apparatus for total integrated backscattering measurement is described that operates in the UV to IR spectral region. Background levels smaller than 0.1 ppm at 633 nm have been achieved. During the measurement, the sample surface is scanned automatically, yielding one- or two-dimensional scattering diagrams. From the latter, small defects on supersmooth surfaces can be localized. Results are reported of measurements on samples with different surface qualities such as supersmooth Si-wafers with sub-angstrom roughness, CaF2 substrates, thin film optical coatings and rough engineering surfaces. The equipment is involved in standardization project ISO/CD 13696'.

Paper Details

Date Published: 26 September 1997
PDF: 8 pages
Proc. SPIE 3141, Scattering and Surface Roughness, (26 September 1997); doi: 10.1117/12.287805
Show Author Affiliations
Angela Duparre, Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)
Stefan Gliech, Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)

Published in SPIE Proceedings Vol. 3141:
Scattering and Surface Roughness
Zu-Han Gu; Alexei A. Maradudin, Editor(s)

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