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Proceedings Paper

Surface inspection of transparent materials with a compact reflection sensor
Author(s): Mathias Koscheck; Wolfram Kleuver; Juergen Weber; Klaus Hartmann
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Paper Abstract

Introduction of a compact sensor system to detect abnormalities on high graded, polished surfaces in production process. Usable for TQM in line of coating quality of lenses, glass plates, wafers or other high quality products. Optimized for non destructive, high speed scanning (2.5 m/s) of transparent materials with a low reflection rate and a resolution down to some micrometers 's. Reachable even in a noisy industrial environment. Available in a 19' rack with profibus data-link.

Paper Details

Date Published: 25 September 1997
PDF: 9 pages
Proc. SPIE 3100, Sensors, Sensor Systems, and Sensor Data Processing, (25 September 1997); doi: 10.1117/12.287763
Show Author Affiliations
Mathias Koscheck, Univ. Siegen (Germany)
Wolfram Kleuver, Univ. Siegen (Germany)
Juergen Weber, Univ. Siegen (Germany)
Klaus Hartmann, Univ. Siegen (Germany)

Published in SPIE Proceedings Vol. 3100:
Sensors, Sensor Systems, and Sensor Data Processing
Otmar Loffeld, Editor(s)

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