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Proceedings Paper

Frequency analysis for roughness of optical surface by focal plane CCD camera
Author(s): Jianbai Li; Aihan Ying; Xiaoyun Li; Xiaolin Zhang; Anqing Zao
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Paper Abstract

In this paper, the new method on evaluating and measuring roughness of optical surface by Fourier spatial frequency analysis is presented. Authors have gotten the equipment, in which the electron photomicrographs of optical surface is scanned and analyzed by CCD camera--microcomputer system. The new method have both good virtual and lateral resolution, fast scanning speed and better measuring accuracy.

Paper Details

Date Published: 25 September 1997
PDF: 4 pages
Proc. SPIE 3100, Sensors, Sensor Systems, and Sensor Data Processing, (25 September 1997); doi: 10.1117/12.287739
Show Author Affiliations
Jianbai Li, Jiangxi Academy of Sciences (China)
Aihan Ying, Jiangxi Academy of Sciences (China)
Xiaoyun Li, Jiangxi Academy of Sciences (China)
Xiaolin Zhang, Jiangxi Academy of Sciences (China)
Anqing Zao, Jiangxi Academy of Sciences (China)


Published in SPIE Proceedings Vol. 3100:
Sensors, Sensor Systems, and Sensor Data Processing
Otmar Loffeld, Editor(s)

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