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Proceedings Paper

CMOS binary position-sensitive photodetector (PSD) array
Author(s): Anssi Jaakko Maekynen; Timo E. Rahkonen; Juha Tapio Kostamovaara
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Paper Abstract

The implementation and test results of a 16 by 16 binary CMOS photodetector array for position sensing applications are presented. Unlike conventional position sensitive detectors (PSDs), it can be used for simultaneous multiple spot detection with high accuracy. To decrease the signal processing overhead characteristic of this kind of area arrays, binary detection and random access readout is used. The fill factor and pitch of the array are 30% and 50 micrometers , respectively. Spatial quantization limited position sensing accuracy of 4.3 micrometers is achieved using a uniform spot of 280 micrometers in diameter, total signal power of about 8 nW and pulse width of 8 ms. At lower signal levels, the accuracy is decreased by the spatial noise caused by the nonuniformity of the threshold currents. The array outperforms a typical large-area (approximately 100 mm2) lateral effect PSD (LEP) when a measurement bandwidth smaller than 10 kHz is used.

Paper Details

Date Published: 25 September 1997
PDF: 9 pages
Proc. SPIE 3100, Sensors, Sensor Systems, and Sensor Data Processing, (25 September 1997); doi: 10.1117/12.287730
Show Author Affiliations
Anssi Jaakko Maekynen, Univ. of Oulu (Finland)
Timo E. Rahkonen, Univ. of Oulu (Finland)
Juha Tapio Kostamovaara, Univ. of Oulu (Finland)


Published in SPIE Proceedings Vol. 3100:
Sensors, Sensor Systems, and Sensor Data Processing
Otmar Loffeld, Editor(s)

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