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Proceedings Paper

Knowledge-based software system for fast yield loss detection in a semiconductor fab
Author(s): Victorino Martin Santamaria; Miguel Recio; Miguel Alonso Merino; Julian Moreno; Almudena Fernandez; Gerardo Gonzalez; Guillermo Sanchez; Luis J. Barrios; Maria D. del Castillo; Lissette Lemus; Angel L. Gonzalez
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Paper Abstract

The comparative analysis of process machines in terms of yield related metrics (such as probe and E-Test data, process and particle data,. ..) is a source of a great deal of information for yield improvement. With this aim we published on SPIE's Microelectronic Manufacturing an Advanced Software System to detect machine-related yield limitors using a comparative analysis. This paper presents the natural expansion of that Software System by converting it into a more knowledge-based tool for fast yield loss detection on a semiconductor fab. The new System performs, in an automatic mode, the comparison among machines for every single step selected in the fabrication routing. The detection of statistically significative differences among machines at every step is performed using algorithms that incorporate the overall analysts experience on our fab. The output of the System allows a fast detection and reaction to yield issues, mainly to those that are still on the initial or baseline stages.

Paper Details

Date Published: 11 September 1997
PDF: 14 pages
Proc. SPIE 3216, Microelectronic Manufacturing Yield, Reliability, and Failure Analysis III, (11 September 1997); doi: 10.1117/12.284691
Show Author Affiliations
Victorino Martin Santamaria, Lucent Technologies Madrid (Spain)
Miguel Recio, Lucent Technologies Madrid (Spain)
Miguel Alonso Merino, Lucent Technologies Madrid (Spain)
Julian Moreno, Lucent Technologies Madrid (Spain)
Almudena Fernandez, Lucent Technologies Madrid (Spain)
Gerardo Gonzalez, Lucent Technologies Madrid (Spain)
Guillermo Sanchez, Lucent Technologies Madrid (Spain)
Luis J. Barrios, Instituto de Automatica Industrial (Spain)
Maria D. del Castillo, Instituto de Automatica Industrial (Spain)
Lissette Lemus, Instituto de Automatica Industrial (Spain)
Angel L. Gonzalez, Instituto de Automatica Industrial (Spain)

Published in SPIE Proceedings Vol. 3216:
Microelectronic Manufacturing Yield, Reliability, and Failure Analysis III
Ali Keshavarzi; Sharad Prasad; Hans-Dieter Hartmann, Editor(s)

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