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Proceedings Paper

Electroless Cu and barrier layers for subhalf-micron multilevel interconnects
Author(s): Sergey D. Lopatin; Yosef Y. Shacham-Diamand; Valery M. Dubin; P. K. Vasudev
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Paper Abstract

Characteristics of electroless Cu, Co and Ni alloys for a multilevel metallization as well as for local interconnects and silicide formations for sub-0.5 micrometers ULSIs are presented. An integration of the electroless Cu and CoWP multilayers in an ULSI damascene process for the quarter-micron Cu interconnects of aspect ratio 4:1 is discussed. The following techniques are involved in this process: conformal electroless deposition of CoWP barrier on the thin sputtered Co seed layer, electroless Cu deposition directly onto CoWP barrier to fill a deep trench or a via, removal of the excess barrier and Cu on the oxide by chemical mechanical polishing, Pd activation of the Cu surface and selective electroless CoWP deposition onto Pd- activated in-laid Cu lines to prevent Cu oxidation and corrosion. The study of the selective electroless NiP deposition on Si for silicide formations for sub-0.25micrometers ULSI technology is also presented.

Paper Details

Date Published: 5 September 1997
PDF: 12 pages
Proc. SPIE 3214, Multilevel Interconnect Technology, (5 September 1997); doi: 10.1117/12.284661
Show Author Affiliations
Sergey D. Lopatin, Cornell Univ. (United States)
Yosef Y. Shacham-Diamand, Cornell Univ. (Israel)
Valery M. Dubin, Advanced Micro Devices, Inc. (United States)
P. K. Vasudev, SEMATECH (United States)

Published in SPIE Proceedings Vol. 3214:
Multilevel Interconnect Technology
Divyesh N. Patel; Mart Graef, Editor(s)

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