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Proceedings Paper

Refractive and diffractive elements for micro-optical systems
Author(s): Philippe Nussbaum; Hans Peter Herzig
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Paper Abstract

We report on our activities in the design, fabrication and characterization of refractive and diffractive micro-optical elements and their integration into micro-systems. Various fabrication techniques like interferometric recording, mask projection steps, or direct writing are used to generate high resolution surface-relief profiles in photoresist. The transfer of the surface profile into glass or quartz is possible using reactive ion etching (RIE). Low-cost micro- optical elements can be fabricated in organic polymers using various replication techniques. Different types of micro- optical elements can be integrated on a substrate together with other opto-electronic components. We present selected applications in the field of laser beam shaping, space communications and blood gas sensors.

Paper Details

Date Published: 2 September 1997
PDF: 12 pages
Proc. SPIE 3226, Microelectronic Structures and MEMS for Optical Processing III, (2 September 1997); doi: 10.1117/12.284572
Show Author Affiliations
Philippe Nussbaum, Univ. of Neuchatel (Switzerland)
Hans Peter Herzig, Univ. of Neuchatel (Switzerland)

Published in SPIE Proceedings Vol. 3226:
Microelectronic Structures and MEMS for Optical Processing III
M. Edward Motamedi; Hans Peter Herzig, Editor(s)

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