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Proceedings Paper

SAMPLE (Sandia agile MEMS prototyping, layout tools, and education)
Author(s): Brady R. Davies; Carole Craig Barron; Jeffry J. Sniegowski; M. Steven Rodgers
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Paper Abstract

The SAMPLE (Sandia agile MEMS prototyping, layout tools, and education) service makes Sandia's state-of-the-art surface micromachining fabrication process, known as SUMMiT, available to U.S. industry for the first time. The service provides a short course and customized computer-aided design (CAD) tools to assist customers in designing micromachine prototypes to be fabricated in SUMMiT. Frequent small-scale manufacturing runs then provide SAMPLE designers with hundreds of sophisticated MEMS (microelectromechanical systems) chips. SUMMiT (Sandia ultra-planar, multi-level MEMS technology) offers unique surface-micromachining capabilities, including four levels of polycrystalline silicon (including the ground layer), flanged hubs, substrate contacts, one-micron design rules, and chemical-mechanical polishing (CMP) planarization. This paper describes the SUMMiT process, design tools, and other information relevant to the SAMPLE service and SUMMiT process.

Paper Details

Date Published: 2 September 1997
PDF: 11 pages
Proc. SPIE 3226, Microelectronic Structures and MEMS for Optical Processing III, (2 September 1997); doi: 10.1117/12.284568
Show Author Affiliations
Brady R. Davies, Sandia National Labs. (United States)
Carole Craig Barron, Sandia National Labs. (United States)
Jeffry J. Sniegowski, Sandia National Labs. (United States)
M. Steven Rodgers, Sandia National Labs. (United States)


Published in SPIE Proceedings Vol. 3226:
Microelectronic Structures and MEMS for Optical Processing III
M. Edward Motamedi; Hans Peter Herzig, Editor(s)

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