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Proceedings Paper

Strategies toward the development of integrated chemical sensors fabricated from light-emitting porous silicon
Author(s): Jeffrey L. Coffer; Libing Zhang; John St. John
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Paper Abstract

In this work several different approaches designed to produce an opto-electronic chemical sensor based on light-emitting porous Si are described, all of which entail modification of the as-formed porous Si surface in order to alter device characteristics. The issue of selectivity and sensitivity of a given porous Si sensor can be modified by coating the porous Si surface with 'basket'-shaped molecules known as calixarenes; the ability of such a structure to detect copper ions and organonitrogen compounds is reported. Surface modification of porous Si through etching and deposition of conducting polymers in order to alter Si light emission color and intensity is also discussed. The fabrication of porous Si- based waveguides on Si and the impact of surface modification with erbium ions are also described.

Paper Details

Date Published: 2 September 1997
PDF: 12 pages
Proc. SPIE 3226, Microelectronic Structures and MEMS for Optical Processing III, (2 September 1997); doi: 10.1117/12.284565
Show Author Affiliations
Jeffrey L. Coffer, Texas Christian Univ. (United States)
Libing Zhang, Texas Christian Univ. (United States)
John St. John, Texas Christian Univ. (United States)


Published in SPIE Proceedings Vol. 3226:
Microelectronic Structures and MEMS for Optical Processing III
M. Edward Motamedi; Hans Peter Herzig, Editor(s)

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