Share Email Print

Proceedings Paper

Integrated optics for displacement sensors
Author(s): Thiemo Lang; Isabelle Schanen-Duport; Pierre Benech
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

The use of integrated optical components can be highly beneficial in the realization of displacement sensors. To affront efficiently the problems related with fringe counting and signal fading, the configuration of the optical interferometer is particularly important. Passive interferometer configurations are preferred, with the phase shifted output signals being directly available optically, since they allow a simplified electronic processing for fringe counting and phase demodulation. This article reviews the contributions integrated optics can make in the realization of efficient, compact and reliable displacement sensors. Special emphasis is made in comparing passive interferometer configurations to obtain the phase diversity. The different possibilities in the realization and integration of the optical, optoelectronical and electronical elements are mentioned.

Paper Details

Date Published: 2 September 1997
PDF: 12 pages
Proc. SPIE 3226, Microelectronic Structures and MEMS for Optical Processing III, (2 September 1997); doi: 10.1117/12.284564
Show Author Affiliations
Thiemo Lang, ENSERG (France)
Isabelle Schanen-Duport, ENSERG (France)
Pierre Benech, ENSERG (France)

Published in SPIE Proceedings Vol. 3226:
Microelectronic Structures and MEMS for Optical Processing III
M. Edward Motamedi; Hans Peter Herzig, Editor(s)

© SPIE. Terms of Use
Back to Top