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Proceedings Paper

Physical and chemical sensing using monolithic semiconductor optical transducers
Author(s): Hans P. Zappe; Daniel Hofstetter; Bernd Maisenhoelder; Michael Moser; Peter Riel; Rino E. Kunz
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Paper Abstract

We present two monolithically integrated optical sensor systems based on semiconductor photonic integrated circuits. These compact, robust and highly functional transducers perform all necessary optical and electro-optical functions on-chip; extension to multi-sensor arrays is easily envisaged. A monolithic Michelson interferometer for high-resolution displacement measurement and a monolithic Mach-Zehnder interferometer for refractometry are discussed.

Paper Details

Date Published: 2 September 1997
PDF: 8 pages
Proc. SPIE 3226, Microelectronic Structures and MEMS for Optical Processing III, (2 September 1997); doi: 10.1117/12.284563
Show Author Affiliations
Hans P. Zappe, Centre Suisse d'Electronique et de Microtechnique (Switzerland)
Daniel Hofstetter, Centre Suisse d'Electronique et de Microtechnique (Switzerland)
Bernd Maisenhoelder, Centre Suisse d'Electronique et de Microtechnique (Switzerland)
Michael Moser, Centre Suisse d'Electronique et de Microtechnique (Switzerland)
Peter Riel, Centre Suisse d'Electronique et de Microtechnique (Switzerland)
Rino E. Kunz, Centre Suisse d'Electronique et de Microtechnique (Switzerland)


Published in SPIE Proceedings Vol. 3226:
Microelectronic Structures and MEMS for Optical Processing III
M. Edward Motamedi; Hans Peter Herzig, Editor(s)

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