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Proceedings Paper

Effects of membrane curvature on the optical performance of the Mechanical Anti-Reflection Switch (MARS) modulator
Author(s): Keith W. Goossen; James A. Walker; Dennis S. Greywall
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Paper Abstract

The mechanical anti-reflection switch is an optical modulator based on the electrostatically induced vertical movement of a membrane above the substrate. Two basic types may exist, one where the membrane is insulating, wherein an electrode with an optical window is placed upon the membrane, and a second where the membrane is conducting, requiring no separate electrode. The first has the advantage that the region in the optical window is flat, but the disadvantage that since the window has no force applied to it, higher voltages are required for the same speed. We examine here the effects of membrane curvature on the optical performance of the second type.

Paper Details

Date Published: 2 September 1997
PDF: 8 pages
Proc. SPIE 3226, Microelectronic Structures and MEMS for Optical Processing III, (2 September 1997); doi: 10.1117/12.284562
Show Author Affiliations
Keith W. Goossen, Lucent Technologies/Bell Labs. (United States)
James A. Walker, Lucent Technologies/Bell Labs. (United States)
Dennis S. Greywall, Lucent Technologies/Bell Labs. (United States)


Published in SPIE Proceedings Vol. 3226:
Microelectronic Structures and MEMS for Optical Processing III
M. Edward Motamedi; Hans Peter Herzig, Editor(s)

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